JPH0522256Y2 - - Google Patents

Info

Publication number
JPH0522256Y2
JPH0522256Y2 JP1988066415U JP6641588U JPH0522256Y2 JP H0522256 Y2 JPH0522256 Y2 JP H0522256Y2 JP 1988066415 U JP1988066415 U JP 1988066415U JP 6641588 U JP6641588 U JP 6641588U JP H0522256 Y2 JPH0522256 Y2 JP H0522256Y2
Authority
JP
Japan
Prior art keywords
raw material
flow rate
gas
gas supply
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988066415U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01170439U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988066415U priority Critical patent/JPH0522256Y2/ja
Publication of JPH01170439U publication Critical patent/JPH01170439U/ja
Application granted granted Critical
Publication of JPH0522256Y2 publication Critical patent/JPH0522256Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP1988066415U 1988-05-20 1988-05-20 Expired - Lifetime JPH0522256Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988066415U JPH0522256Y2 (en]) 1988-05-20 1988-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988066415U JPH0522256Y2 (en]) 1988-05-20 1988-05-20

Publications (2)

Publication Number Publication Date
JPH01170439U JPH01170439U (en]) 1989-12-01
JPH0522256Y2 true JPH0522256Y2 (en]) 1993-06-08

Family

ID=31291822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988066415U Expired - Lifetime JPH0522256Y2 (en]) 1988-05-20 1988-05-20

Country Status (1)

Country Link
JP (1) JPH0522256Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49128999U (en]) * 1973-03-08 1974-11-06

Also Published As

Publication number Publication date
JPH01170439U (en]) 1989-12-01

Similar Documents

Publication Publication Date Title
JP3331636B2 (ja) 水分発生方法
JPH05291142A (ja) 液体ソース供給装置
JP3828821B2 (ja) 液体材料気化供給装置
JPH01132127A (ja) 反応装置
JPH05228361A (ja) 液体材料気化供給装置
JPS5934420B2 (ja) 化学蒸気分配システム
JPH0522256Y2 (en])
US6065489A (en) Ozone flow rate control device
US4075293A (en) Control system for an absorption column
WO2009076611A1 (en) Delivery of iodine gas
JPH0553760B2 (en])
US6228175B1 (en) Apparatus for generating a wet oxygen stream for a semiconductor processing furnace
JPH01293130A (ja) 原料ガス供給装置
JPS60244332A (ja) 凝縮性材料のガス化供給装置
JPH0499279A (ja) 液体材料の気体化供給方法と供給装置
JPH0642938B2 (ja) 気化ガスの流量制御装置
JPH04114728A (ja) 液体ソース供給装置
JPS6082668A (ja) ガス流量制御装置
JPS61257232A (ja) 液体材料ガス発生方法
JPH0362790B2 (en])
JPH052701U (ja) 液体材料気化供給装置
KR0113180Y1 (ko) 액화 화학약품의 증기 압력 조절장치
JPS602667A (ja) 固体原料の昇華供給装置
US6294078B1 (en) Antifoulant control process
JPH0395448A (ja) 熱分析装置のガス供給装置